WVCP3000 Amazi Yumuyaga Cryopump Cryogenic Sisitemu

Ibisobanuro bigufi:

Kwihuta byihuse
Umutego ukonje ukonje kugeza -135 ℃
Kugabanya Pump down Times kuri 25% kugeza 50%
Gukoresha ingufu nke
Ingaruka nkeya kubidukikije, nta CFC na HCFCs


Ibisobanuro birambuye

Ibiranga ibicuruzwa

Ibisobanuro ku bicuruzwa

Guangzhou Xieyi Automation Technology Co., Ltd. yashinzwe mu 2011, ni uruganda rudasanzwe rw’ikoranabuhanga mu Bushinwa bwo mu majyepfo rufite uruhare mu iterambere ry’ubushakashatsi, umusaruro, kugisha inama tekiniki na serivisi kuri pompe zifata amazi y’ubushyuhe bukabije n’ubundi ibikoresho by'ubushyuhe bukabije.

XIEYI WVCP Cryochillers ifunze sisitemu yo gukonjesha ya loop cryogenic itanga watts 550 ~ 6000 watts yo gukonja.Izi cryochillers zirashobora gukoreshwa mugutwara imyuka yamazi nibindi bintu byegeranye bikonjeshwa hejuru yubukonje nka coil ya Meissner (cryocoil).WVCP cryochillers nayo ikoreshwa mugukonjesha ibintu nka chucks ya electrostatike ikoreshwa mugutunganya semiconductor wafer.

Ikigereranyo cya tekiniki

Icyitegererezo WVCP3000-SH WVCP3000-DH
Ubushobozi ntarengwa bwo gukonjesha (W) 3000 3000
Igitekerezo ntarengwa cyo kuvoma umuvuduko wumutego ukonje (L / S) 249900 249900
Igitekerezo cyihuta cyumutego ukonje (L / S) 352800 352800
Icyuho cya nyuma (mbar) 2 * 10-8 2 * 10-8
Igihe cyo gukuramo umwanya munini wumutego ukonje (min) <3 <3
Guhindura ubushyuhe bwa defrost (℃) -20 ~ 30 -20 ~ 30
Uburyo bwo kugenzura igitutu Rukuruzi ya Digital + Guhindura imashini Rukuruzi ya Digital + Guhindura imashini
Kugarura byihuse imikorere yingutu (QRBP) Yego Yego
Igikorwa cyo guhagarika amavuta (OBP) Yego Yego
4G Kugenzura kure Yego Yego
Ibikoresho bikonje bikonje Gushyigikira Gushyigikira
Ubuso ntarengwa bwumutego ukonje (㎡) 1.7 1.7
Ubuso ntarengwa bwumutego ukonje (㎡) 2.4 2.4
Ibisobanuro byumutego umwe ukonje (㎡) φ16mm * 34m /
Ibisobanuro byumutego ukonje kabiri (㎡) / 2 * φ16mm * 17m
Imigaragarire ya gaz 12.7 Umuringa wo gusudira (Umuringa) 12.7 Umuringa wo gusudira (Umuringa)
ParkerCPI / VCR (Bihitamo) ParkerCPI / VCR (Bihitamo)
Amazi akonje (L / Min kuri 24 ℃) 28 28
Ubushyuhe bwo gukonjesha amazi (℃) 38 38
Umunara ukonje Yego Yego
Guhuza amazi akonje (L / S) G3 / 4 G3 / 4
Imbaraga ntarengwa (kW) 16.5 16.5
Compressor nominal power (HP) 10 10
Amashanyarazi (50HZ) 380-400V AC 3P (H) 380-400V AC 3P (H)
200-230V AC 3P (L) 200-230V AC 3P (L)
Igipimo (MM) 935 (L) * 873 (D) * 1809 (H) 935 (L) * 873 (D) * 1809 (H)
Ibiro (KG) 480 480

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