Intangiriro Kandi Byumvikane Byoroshye Kubitwikiriye (3)

Ipitingi ya sputtering Iyo ingufu nyinshi zifite ibisasu hejuru yubutaka, ibice byo hejuru birashobora kubona imbaraga kandi bigahunga hejuru kugirango bishyirwe kuri substrate.Sputtering phenomenon yatangiye gukoreshwa muburyo bwa tekinoroji yo gutwika mu 1870, hanyuma buhoro buhoro ikoreshwa mubikorwa byinganda nyuma ya 1930 kubera ubwiyongere bwikigero cyo kubitsa.Ibikoresho bisanzwe bikoreshwa mu bikoresho bya pole byerekanwe ku gishushanyo cya 3 [Igishushanyo mbonera cya vacuum coating pole sputtering].Mubisanzwe ibikoresho bigomba kubikwa bikozwe mu isahani-intego, ishyizwe kuri cathode.Substrate ishyirwa kuri anode ireba hejuru yintego, santimetero nke uvuye kurugero.Sisitemu imaze kuvomerwa mu cyuho kinini, yuzuyemo gaze ya 10 ~ 1 Pa (ubusanzwe argon), hanyuma hagashyirwaho voltage ya volt ibihumbi byinshi hagati ya cathode na anode, hanyuma hagasohoka urumuri hagati ya electrode zombi. .Iyoni nziza itangwa no gusohora iguruka kuri cathode munsi yumuriro wamashanyarazi hanyuma igahura na atome hejuru yintego.Intego za atome zihunga hejuru yintego kubera kugongana zitwa atom sputtering atom, kandi imbaraga zazo ziri mumurongo wa 1 kugeza kuri mirongo ya volt electron.Atome zimenetse zishyirwa hejuru ya substrate kugirango zikore firime.Bitandukanye no guhumeka, gutwikisha ibintu ntibigarukira gusa aho gushonga kwibikoresho bya firime, kandi birashobora gusohora ibintu bivunika nka W, Ta, C, Mo, WC, TiC, nibindi. buryo, ni ukuvuga gaze ya reaction (O, N, HS, CH, nibindi) ni

wongeyeho gaze ya Ar, na gaze ya reaction na ion zayo zifata hamwe na atome yagenewe cyangwa atom yajugunywe kugirango ikore ibice (nka oxyde, azote), nibindi) hanyuma bigashyirwa kuri substrate.Uburyo bwihuta bwo gusohora burashobora gukoreshwa mukubitsa firime.Substrate yashyizwe kuri electrode ihagaze, kandi intego yo kubika izashyirwa kuri electrode itandukanye.Impera imwe yumuriro mwinshi wumuriro urahagarara, kandi impera imwe ihujwe na electrode ifite intego yo gukingira binyuze mumurongo uhuza hamwe na capacitori ya DC.Nyuma yo gufungura amashanyarazi menshi, amashanyarazi menshi yumurongo uhora uhindura polarite.Electron hamwe na ion nziza muri plasma yakubise intego yo gukingura mugihe cyigice cyiza cyikurikiranya hamwe nigice cyikurikiranya cyumubyigano.Kubera ko moteri ya elegitoronike irenze iyo ion nziza, ubuso bwintego yo gukingira bwishyuzwa nabi.Iyo imbaraga zingana zingana zimaze kugerwaho, intego iba iri kubogama kubogamye, kuburyo ion nziza zisuka ku ntego zikomeza.Gukoresha magnetron gusohora birashobora kongera igipimo cyo kubitsa hafi yuburyo bunini ugereranije na magnetron.