WVCP6000 Amazi Yumuyaga Cryopump Cryogenic Sisitemu
Ibisobanuro ku bicuruzwa
Guangzhou Xieyi Automation Technology Co., Ltd. yashinzwe mu 2011, ni uruganda rudasanzwe rw’ikoranabuhanga mu Bushinwa bwo mu majyepfo rufite uruhare mu iterambere ry’ubushakashatsi, umusaruro, kugisha inama tekiniki na serivisi kuri pompe zifata amazi y’ubushyuhe bukabije n’ubundi ibikoresho by'ubushyuhe bukabije.
XIEYI WVCP Cryochillers ifunze sisitemu yo gukonjesha ya loop cryogenic itanga watts 550 ~ 6000 watts yo gukonja.Izi cryochillers zirashobora gukoreshwa mugutwara imyuka yamazi nibindi bintu byegeranye bikonjeshwa hejuru yubukonje nka coil ya Meissner (cryocoil).WVCP cryochillers nayo ikoreshwa mugukonjesha ibintu nka chucks ya electrostatike ikoreshwa mugutunganya semiconductor wafer.
Ikigereranyo cya tekiniki
| Icyitegererezo | WVCP6000-SH | WVCP6000-DH |
| Ubushobozi ntarengwa bwo gukonjesha (W) | 6000 | 6000 |
| Igitekerezo ntarengwa cyo kuvoma umuvuduko wumutego ukonje (L / S) | 588000 | 588000 |
| Igitekerezo cyihuta cyumutego ukonje (L / S) | 882000 | 882000 |
| Icyuho cya nyuma (mbar) | 2 * 10-8 | 2 * 10-8 |
| Igihe cyo gukuramo umwanya munini wumutego ukonje (min) | <5 | <5 |
| Guhindura ubushyuhe bwa defrost (℃) | -20 ~ 30 | -20 ~ 30 |
| Uburyo bwo kugenzura igitutu | Rukuruzi ya Digital + Guhindura imashini | Rukuruzi ya Digital + Guhindura imashini |
| Kugarura byihuse imikorere yimikorere (QRBP) | Yego | Yego |
| Igikorwa cyo guhagarika amavuta (OBP) | Yego | Yego |
| 4G Kugenzura kure | Yego | Yego |
| Ibikoresho bikonje bikonje | Gushyigikira | Gushyigikira |
| Ubuso ntarengwa bwumutego ukonje (㎡) | 4 | 4 |
| Ubuso ntarengwa bwumutego ukonje (㎡) | 6 | 6 |
| Ibisobanuro byumutego umwe ukonje (㎡) | φ16mm * 80m | / |
| Ibisobanuro byumutego ukonje kabiri (㎡) | / | 2 * φ16mm * 40m |
| Imigaragarire ya gaz | 12.7 Umuringa wo gusudira (Umuringa) | 12.7 Umuringa wo gusudira (Umuringa) |
| ParkerCPI / VCR (Bihitamo) | ParkerCPI / VCR (Bihitamo) | |
| Amazi akonje (L / Min kuri 24 ℃) | 48 | 48 |
| Ubushyuhe bwo gukonjesha amazi (℃) | 38 | 38 |
| Umunara ukonje | Yego | Yego |
| Guhuza amazi akonje (L / S) | G1 ” | G1 ” |
| Imbaraga ntarengwa (kW) | 25.3 | 25.3 |
| Compressor nominal power (HP) | 20 | 20 |
| Amashanyarazi (50HZ) | 380-400V AC 3P (H) | 380-400V AC 3P (H) |
| 200-230V AC 3P (L) | 200-230V AC 3P (L) | |
| Igipimo (MM) | 935 (L) * 873 (D) * 1809 (H) | 1235 (L) * 873 (D) * 1809 (H) |
| Ibiro (KG) | 655 | 655 |
Andika ubutumwa bwawe hano hanyuma utwohereze
